A virtual microscope for simulation of Nanostructures
نویسندگان
چکیده
Light-matter interplay is widely used for analyzing the topology of surfaces on small scales use in areas such as nanotechnology, nanoelectronics, photonics, and advanced materials. Conventional optical microscope imaging methods are limited resolution to a value comparable wavelength, so-called Abbe limit, cannot be measure nano-sized structures. Scatterometry an method that can structures smaller than wavelength. However, relative uncertainties structure dimensions measured with scatterometry increase decreasing size, industry therefore looking replacing simple intensity based phase-sensitive measurement coherent Mueller ellipsometry. In this work, we present virtual capable simulating ellipsometry response from one-dimensional two-dimensional periodic Furthermore, argue nonnormalized gives results less standard normalized
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ژورنال
عنوان ژورنال: Epj Web of Conferences
سال: 2022
ISSN: ['2101-6275', '2100-014X']
DOI: https://doi.org/10.1051/epjconf/202226610004